Company Filing History:
Years Active: 1995-2002
Title: The Innovations of Pamela Lou
Introduction
Pamela Lou is a prominent inventor based in San Francisco, CA. She has made significant contributions to the field of chemical vapor deposition, particularly in the deposition of amorphous silicon thin films. With a total of 3 patents, her work has advanced the technology used in thin film transistors.
Latest Patents
One of her latest patents is titled "Method for depositing amorphous silicon thin films onto large area glass substrates by chemical vapor deposition at high deposition rates." This innovative method allows for the deposition of amorphous silicon thin films at high rates using specific pressure and temperature conditions. Improved transistor characteristics are achieved when the substrate is treated with hydrogen plasma or when a preliminary layer of amorphous silicon is deposited at a slower rate.
Another notable patent is the "Method for multilayer CVD processing in a single chamber." This patent describes a process for multilayer deposition of thin films onto glass substrates, enabling the formation of thin film transistors in a single chamber under similar reaction conditions. Sequential layers of silicon nitride and amorphous silicon can be deposited efficiently, enhancing the overall performance of the devices.
Career Highlights
Pamela Lou is currently employed at Applied Materials, Inc., where she continues to innovate in the field of chemical vapor deposition. Her expertise and contributions have positioned her as a key figure in the development of advanced materials for electronic applications.
Collaborations
Throughout her career, Pamela has collaborated with notable colleagues, including Kam S Law and Robert M Robertson. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Pamela Lou's work in the field of chemical vapor deposition has led to significant advancements in the technology used for thin film transistors. Her patents reflect her commitment to innovation and her impact on the industry.