This inventor holds 2 USPTO granted patents. Top assignee: Axcelis Technologies, Inc.. Active years: 2004-2006.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2004-2006
Title: Palanikumaran Sakthievel: Innovator in Plasma Processing Technology
Introduction
Palanikumaran Sakthievel is a notable inventor based in Gaithersburg, MD (US). He has made significant contributions to the field of plasma processing, particularly in the generation and transport of low-energy ions for semiconductor applications. With a total of 2 patents to his name, his work is pivotal in advancing semiconductor technology.
Latest Patents
One of his latest patents is titled "Method and apparatus for micro-jet enabled, low energy ion generation and transport in plasma processing." This invention discloses a method for creating and transporting low-energy ions for use in plasma processing of semiconductor wafers. The process involves generating plasma from a gas species to produce a plasma exhaust, which is then introduced into a processing chamber containing the wafer. The ion content of the plasma exhaust is enhanced by activating a supplemental ion source, creating a primary plasma discharge. This discharge is directed into a baffle plate assembly, resulting in a secondary plasma discharge. The strength of the electric field exerted on ions in the secondary plasma discharge is reduced, allowing ions to bombard the wafer at an energy level that does not damage the semiconductor devices formed on it.
Career Highlights
Palanikumaran Sakthievel is currently employed at Axcelis Technologies, Inc., where he continues to innovate in the field of plasma processing. His work is instrumental in developing technologies that enhance the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
He has collaborated with notable colleagues such as Aseem Kumar Srivastava and Herbert H. Sawin, contributing to a dynamic research environment that fosters innovation and technological advancement.
Conclusion
Palanikumaran Sakthievel's contributions to plasma processing technology are significant and impactful. His inventions are paving the way for advancements in semiconductor manufacturing, ensuring that technology continues to evolve and improve.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile