Ollie C Woodard

Title: The Innovative Contributions of Ollie C Woodard

Introduction

Ollie C Woodard is a notable inventor based in Poughkeepsie, NY (US). She has made significant contributions to the field of semiconductor manufacturing, holding a total of 4 patents. Her work focuses on advanced electron beam systems that enhance the efficiency and accuracy of semiconductor processing.

Latest Patents

One of her latest patents is an electron beam system that introduces a method and apparatus for writing patterns on semiconductor wafers. This innovative approach divides the writing field into numerous overlapping subfields with a predetermined periodicity. The system employs a stepped sequential scan for subfield movements, while patterns within each subfield are addressed using vector scanning. This method significantly improves throughput by utilizing magnetic deflection for sequential scanning and electric deflection for vector scanning within the subfields.

Another important patent is for automatic overlay measurements using an electronic beam system. This method and apparatus perform automatic overlay measurements on wafers used in semiconductor manufacturing. The overlay measurements are conducted at selected sites on a wafer where a single bar pattern is overlaid over a double bar pattern. The position of the single bar center line relative to the center line between the double bars indicates the overlay error of the two patterns. This measurement is crucial for monitoring overlay errors and producing statistics that help identify and minimize errors in subsequent wafer processing.

Career Highlights

Ollie C Woodard is currently employed at International Business Machines Corporation, commonly known as IBM. Her work at IBM has allowed her to collaborate with other talented professionals in the field, contributing to the advancement of semiconductor technologies.

Collaborations

Some of her notable coworkers include Edward V Weber and Alan V Hall. Their collaborative efforts have further enhanced the innovative projects they have worked on together.

Conclusion

Ollie C Woodard's contributions to semiconductor manufacturing through her innovative patents and collaborative work at IBM highlight her significant impact in the field. Her advancements in electron beam systems continue to influence the efficiency and accuracy of semiconductor processing.