Company Filing History:
Years Active: 2005
Title: Innovations by Norman E Roberts
Introduction
Norman E Roberts is a notable inventor based in Richmond, Vermont. He has made significant contributions to the field of lithographic processing equipment through his innovative patent. His work focuses on improving the accuracy and efficiency of critical dimension measurements across a wafer's surface.
Latest Patents
Norman E Roberts holds a patent titled "Methods for critical dimension and focus mapping using critical dimension test marks." This patent describes methods for using critical dimension test marks for the rapid determination of the best focus position of lithographic processing equipment. The invention allows for critical dimension measurement analysis across a wafer's surface. In a first embodiment, a plurality of test mark arrays are distributed across the surface of a wafer, with different arrays created at various focus positions. Measurement of the length or area of the resultant test marks enables the determination of the best focus position of the processing equipment. This method allows for the measurement of hundreds of values across a wafer in thirty minutes, significantly faster than traditional methods that require at least five hours.
Career Highlights
Norman E Roberts is associated with Nikon Precision Incorporated, where he applies his expertise in lithography and measurement techniques. His innovative approach has contributed to advancements in the field, enhancing the capabilities of lithographic processing.
Collaborations
Throughout his career, Norman has collaborated with notable colleagues, including Frank C Leung and Etsuya Morita. These collaborations have further enriched his work and contributed to the development of effective solutions in lithographic technology.
Conclusion
Norman E Roberts is a distinguished inventor whose work in critical dimension measurement has made a significant impact on lithographic processing. His innovative methods continue to advance the field, demonstrating the importance of precision in technology.