This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Tokyo Electron Limited. Active years: 2020.
Company Filing History:
Years Active: 2020
Title: Norinao Takasu: Innovator in Plasma Processing Technology
Introduction
Norinao Takasu is a prominent inventor based in Miyagi, Japan. He is known for his contributions to the field of plasma processing technology. His innovative work has led to the development of a unique plasma processing apparatus that enhances various industrial applications.
Latest Patents
Takasu holds a patent for a plasma processing apparatus. This apparatus includes a stage with a lower electrode situated within the inner space of a chamber main body. An upper electrode is positioned above the stage, and a first radio frequency power supply is electrically connected to the upper electrode through a power feed conductor. Additionally, a second radio frequency power supply is connected to the lower electrode. The design features a ground conductor that extends above the chamber main body, providing an external space that is shielded from the upper electrode. An electromagnet is also incorporated into this external space, enhancing the functionality of the apparatus.
Career Highlights
Takasu is associated with Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at the company has significantly contributed to advancements in plasma processing technologies.
Collaborations
Throughout his career, Takasu has collaborated with notable colleagues, including Shuichi Takahashi and Takaharu Miyadate. These collaborations have fostered innovation and development in their respective fields.
Conclusion
Norinao Takasu's contributions to plasma processing technology exemplify the impact of innovative thinking in the industry. His patent and work at Tokyo Electron Limited highlight his role as a key figure in advancing technological solutions.