Company Filing History:
Years Active: 2009-2012
Title: Norikazu Murakami: Innovator in Plasma Processing Technology
Introduction
Norikazu Murakami is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 2 patents. His work focuses on developing advanced apparatuses that enhance the efficiency and effectiveness of plasma processes.
Latest Patents
Murakami's latest patents include a plasma processing apparatus designed to perform plasma processes on target substrates. This apparatus features first and second electrodes positioned to oppose each other within a process chamber. An RF field is generated between these electrodes, which turns a process gas into plasma through excitation. The apparatus is equipped with an RF power supply that connects to one of the electrodes via a matching circuit. This matching circuit automatically adjusts input impedance relative to the RF power. Additionally, a variable impedance setting section is linked to a predetermined member that is electrically coupled with the plasma. This section sets a backward-direction impedance against an RF component input from the plasma. A controller is responsible for supplying a control signal regarding the preset value of the backward-direction impedance to the impedance setting section.
Career Highlights
Norikazu Murakami is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His innovative work in plasma processing has positioned him as a key figure in advancing technology in this sector.
Collaborations
Murakami collaborates with talented coworkers, including Yohei Yamazawa and Manabu Iwata. Their combined expertise contributes to the development of cutting-edge technologies in plasma processing.
Conclusion
Norikazu Murakami's contributions to plasma processing technology through his patents and work at Tokyo Electron Limited highlight his role as an influential inventor in the field. His innovative approaches continue to shape advancements in the industry.