Company Filing History:
Years Active: 1998
Title: Norihito Kaneko: Innovator in Film Thickness Measurement
Introduction
Norihito Kaneko is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the field of measurement technology, particularly in the area of film thickness measurement. His innovative approach has led to the development of a unique apparatus that enhances the accuracy and efficiency of measuring thin films.
Latest Patents
Kaneko holds a patent for a Film Thickness Measuring Apparatus. This invention involves a sample receiving stage where a sample is placed for measurement. The sample is transferred one at a time to a measuring table, where the thickness of a thin film formed on the surface of the sample is measured by irradiating it with a measuring light beam. A covering structure is strategically positioned between the sample receiving stage and the measuring table to define a sample transfer space and a measuring space. Additionally, a high-purity purging gas, containing only a minimal amount of contaminants, is supplied through purging gas supply devices into both the transfer and measuring spaces, ensuring precise measurements.
Career Highlights
Kaneko is associated with Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at this esteemed organization has allowed him to focus on advancing measurement technologies that are crucial for various applications in electronics.
Collaborations
Throughout his career, Kaneko has collaborated with notable colleagues, including Masayuki Imai and Masaaki Amemiya. These collaborations have fostered an environment of innovation and have contributed to the development of cutting-edge technologies in their field.
Conclusion
Norihito Kaneko's contributions to film thickness measurement technology exemplify his dedication to innovation and precision. His patent and work at Tokyo Electron Limited highlight his role as a key figure in advancing measurement techniques in the electronics industry.