Noh Jung Kwak

Title: Noh Jung Kwak: Innovator in Semiconductor Technology

Introduction

Noh Jung Kwak is a prominent inventor based in Gyeonggi-do, South Korea. He has made significant contributions to the field of semiconductor technology, holding 2 patents that enhance the reliability and efficiency of semiconductor devices. His work is instrumental in advancing the capabilities of modern electronics.

Latest Patents

One of Noh Jung Kwak's latest patents is a method for forming copper wiring in a semiconductor device. This innovative process addresses the prevention of copper ion migration, which is crucial for maintaining the integrity of semiconductor devices. The method involves a post-cleaning process for a copper layer that has undergone a chemical mechanical polishing (CMP) process. This includes a primary chemical cleaning using a citric acid-based chemical, followed by a secondary cleaning with an ascorbic acid-based chemical. The completion of this process significantly improves the reliability of semiconductor devices by preventing copper ion migration over time.

Another notable patent is the method of forming a tungsten polymetal gate with low resistance. This process includes several steps, such as forming a gate insulation layer and a polysilicon layer on a semiconductor substrate. It also involves depositing a barrier layer, a tungsten nucleation layer through an atomic layer deposition (ALD) process, and a tungsten layer through a chemical vapor deposition (CVD) process. The method concludes with the deposition of a hard mask layer and subsequent etching of various layers, resulting in a highly efficient tungsten polymetal gate.

Career Highlights

Noh Jung Kwak is currently employed at Hynix Semiconductor Inc., a leading company in the semiconductor industry. His work at Hynix has allowed him to focus on innovative solutions that address critical challenges in semiconductor manufacturing. His expertise and dedication have made him a valuable asset to the company.

Collaborations

Throughout his career, Noh Jung Kwak has collaborated with talented individuals such as Soo Hyun Kim and Baek Mann Kim. These collaborations have fostered an environment of innovation and creativity, leading to advancements in semiconductor technology.

Conclusion

Noh Jung Kwak's contributions to semiconductor technology through his patents and work at Hynix Semiconductor Inc. highlight his role as an influential inventor in the field. His innovative methods for improving semiconductor reliability and efficiency continue to shape the future of electronics.