Company Filing History:
Years Active: 2005-2011
Title: The Innovative Contributions of Noel Corcoran
Introduction
Noel Corcoran is a prominent inventor based in San Jose, California. He has made significant contributions to the field of lithographic imaging, holding a total of seven patents. His work focuses on advanced methods and apparatuses that enhance the efficiency and accuracy of imaging processes.
Latest Patents
One of Noel Corcoran's latest patents is titled "Method and apparatus for performing model-based layout conversion for use with dipole illumination." This innovative method involves generating complementary masks for a multiple-exposure lithographic imaging process. The process includes identifying a target pattern with various features, generating horizontal and vertical masks, and performing a shielding step to replace edges with shields. Additionally, it incorporates an assist feature placement step and a feature biasing step to ensure accurate reproduction of the target pattern.
Another notable patent is "Orientation dependent shielding for use with dipole illumination techniques." This method focuses on printing patterns with vertically and horizontally oriented features on a substrate using dipole illumination. It involves generating vertical and horizontal component masks and illuminating them with X-pole and Y-pole illumination, respectively.
Career Highlights
Noel Corcoran is currently employed at ASML Masktools B.V., where he continues to develop innovative solutions in the field of lithography. His expertise and contributions have positioned him as a key figure in advancing imaging technologies.
Collaborations
Throughout his career, Noel has collaborated with talented individuals such as Jang Fung Chen and Duan-Fu Stephen Hsu. These collaborations have further enriched his work and contributed to the success of various projects.
Conclusion
Noel Corcoran's innovative patents and contributions to lithographic imaging demonstrate his commitment to advancing technology in this field. His work continues to influence the industry and inspire future innovations.
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