Nobuyuki Mori

Title: **Nobuyuki Mori: A Pioneer in Plasma Processing Technologies**

Introduction

Nobuyuki Mori is an innovative inventor based in Yao, Japan, known for his contributions in the field of plasma processing technologies. With a total of 2 patents, Mori has made significant strides in developing advanced methods and apparatus that enhance the efficiency of thin film deposition processes.

Latest Patents

Mori's latest patents highlight his expertise and creativity in plasma technology. The first patent describes a **Plasma Processing Apparatus**, which features a substrate table extending from a wall of the vacuum chamber into its interior. This innovative design includes a rotary holder for the substrate, situated within a concave portion of the substrate table. The rotary holder is rotably supported and sealed with a special sealing member. Additionally, it incorporates blades that facilitate fluid dynamics. A supply port and a drainage port are integrated into the substrate table, allowing for the supply and drainage of fluid, which cools the substrate while generating rotational forces.

The second patent focuses on a **Sputtering Method and Apparatus**. This invention addresses the challenges in achieving symmetrical and uniform film thickness on substrates. By manipulating the interior pressure of the vacuum chamber and eliminating gas currents over the target during film deposition, the invention enhances the deposition process, ensuring a high quality of thin films.

Career Highlights

Mori works at Matsushita Electric Industrial Co., Ltd., an esteemed company in the electronics and innovation sector. His work has significantly advanced the capabilities of plasma processing and thin film technologies, contributing to various applications in electronics manufacturing.

Collaborations

During his career, Mori has collaborated with notable coworkers such as Masahiro Yamamoto and Toshiyuki Suemitsu. Together, they have contributed to the advancement of innovative technologies within their field, showcasing the power of teamwork in research and development.

Conclusion

Nobuyuki Mori's dedication to innovation in plasma processing technologies positions him as a significant figure in the industry. With his groundbreaking patents and collaborative efforts, he continues to push the boundaries of what is possible in the realm of material processing and thin film deposition, ensuring that the future of technology is bright.