Location History:
- Nirasaki, JP (2012)
- Miyagi, JP (2018 - 2019)
Company Filing History:
Years Active: 2012-2019
Title: Nobutaka Nakao: Innovator in Plasma Processing Technology
Introduction
Nobutaka Nakao, an accomplished inventor based in Miyagi, Japan, has made significant contributions to the field of plasma processing. With a total of three patents to his name, Nakao's work reflects his dedication to advancing technology in vacuum processing applications.
Latest Patents
Nakao's latest innovations include a Plasma Processing Apparatus, which is designed to efficiently manage the processing of substrates using plasma technology. This apparatus features a processing container, a gas supply unit, and a mounted table that holds the substrate. The design incorporates an upper electrode and a plasma generation unit that supplies high-frequency power, leading to the generation of plasma. Additionally, it includes a conductive rectification plate that controls the flow of processing gas, ensuring optimal performance during operation.
Another noteworthy patent is the Evacuation Method and Vacuum Processing Apparatus. This invention outlines a method for effectively evacuating a vacuum processing chamber. It describes a systematic approach to managing pressure within the chamber, allowing for the reduction of pressure to specific levels without causing freezing of moisture, thereby enhancing the efficiency and reliability of the vacuum processing.
Career Highlights
Nobutaka Nakao works at Tokyo Electron Limited, a prominent company known for its innovations in semiconductor production equipment. His role at the company has allowed him to engage in cutting-edge research and development initiatives, contributing to advancements in plasma processing technologies that are critical in various industrial applications.
Collaborations
Throughout his career, Nakao has collaborated with talented colleagues, including Hirofumi Haga and Syuichi Takahashi. These partnerships have likely expanded the scope of his work, fostering a collaborative environment that promotes innovation within the field.
Conclusion
Nobutaka Nakao stands out as a notable inventor whose patents reflect a focus on enhancing plasma processing technology. His contributions at Tokyo Electron Limited, along with valuable collaborations, position him as a significant figure in the realm of innovations that propel advancements in manufacturing processes. His work not only influences current practices but also sets the stage for future developments in the industry.