Company Filing History:
Years Active: 2022-2024
Title: Nobumitsu Hirose: Innovator in Semiconductor Technology
Introduction
Nobumitsu Hirose is a prominent inventor based in Koganei, Japan. He has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase his innovative approach to manufacturing semiconductor laminated films.
Latest Patents
Hirose's latest patents include a manufacturing method for semiconductor laminated film and the semiconductor laminated film itself. The semiconductor laminate film consists of a silicon substrate with a semiconductor layer formed on it, containing both silicon and germanium. This semiconductor layer is characterized by a surface roughness Rms of 1 nm or less. Additionally, it adheres to the relationship t≤0.881×x, where t represents the thickness of the semiconductor layer in nanometers, and x denotes the ratio of germanium atoms to the total number of silicon and germanium atoms in the layer.
The manufacturing method involves producing the semiconductor laminate film by a sputtering method. In this process, the film formation temperature is kept below 500°C, with a film formation pressure ranging from 1 mTorr to 11 mTorr. Alternatively, if the film formation temperature is less than 600°C, the pressure must be between 2 mTorr and 5 mTorr. The sputtering method utilizes a gas mixture with less than 0.1% hydrogen, ensuring that the semiconductor layer meets the thickness-to-composition relationship of t≤0.881×x.
Career Highlights
Hirose has worked at notable institutions, including the Tokyo University of Agriculture and Technology and the National Institute of Information and Communications Technology. His work at these organizations has contributed to advancements in semiconductor research and development.
Collaborations
Throughout his career, Hirose has collaborated with esteemed colleagues such as Yoshiyuki Suda and Takahiro Tsukamoto. These partnerships have fostered innovation and progress in the semiconductor field.
Conclusion
Nobumitsu Hirose's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the industry. His work continues to influence advancements in semiconductor manufacturing processes.