This inventor holds 8 USPTO granted patents and 1 EPO patent. Top assignees: Semiconductor Energy Laboratory Co., Ltd., Ricoh Company, Ltd.. Active years: 1997-2010.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Kanagawa, JP (1997 - 2010)
- Atsugi, JP (2007 - 2010)
Company Filing History:
7 out of 16,652 
1 out of 28,957 
Years Active: 1997-2010
Title: Nobuhiro Tanaka: Innovator in Laser Processing Technology
Introduction
Nobuhiro Tanaka is a prominent inventor based in Kanagawa, Japan. He has made significant contributions to the field of laser processing technology, holding a total of 8 patents. His work focuses on enhancing productivity and efficiency in semiconductor manufacturing processes.
Latest Patents
Tanaka's latest patents include a laser processing apparatus and a laser processing process. The laser processing process involves laser annealing a silicon film that is 2 micrometers or less in thickness. This is achieved by irradiating a laser beam with a wavelength of 400 nm or less, operating in pulsed mode with a pulse width of 50 nanoseconds or more, and preferably 100 nanoseconds or more. The laser processing apparatus consists of a laser generation device and a stage for mounting a sample, which is designed to prevent the transfer of vibrations from the stage to the laser generation device and optical system. This innovation allows for a stable laser beam, thereby improving productivity. Additionally, he has developed a heat insulating stamper structure that includes an uppermost section made of a metal material, a lowermost section made of the same material, and a middle section with lower heat conductivity, which incorporates heat insulating portions.
Career Highlights
Throughout his career, Tanaka has worked with notable companies such as Semiconductor Energy Laboratory Co., Ltd. and Ricoh Company, Ltd. His expertise in laser technology has positioned him as a key figure in the advancement of semiconductor manufacturing techniques.
Collaborations
Tanaka has collaborated with esteemed colleagues, including Hideto Ohnuma and Hiroki Adachi. Their combined efforts have contributed to the development of innovative solutions in the field of laser processing.
Conclusion
Nobuhiro Tanaka's contributions to laser processing technology have significantly impacted the semiconductor industry. His innovative patents and collaborations highlight his role as a leading inventor in this field.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile