Location History:
- Lexington, MA (US) (2010)
- Nirasaki, JP (2009 - 2012)
Company Filing History:
Years Active: 2009-2012
Title: Nobuhiro Iwama: Innovator in Plasma Processing Technology
Introduction
Nobuhiro Iwama is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 3 patents. His work focuses on developing advanced apparatuses and methods that enhance the efficiency and effectiveness of plasma processes.
Latest Patents
One of Iwama's latest patents is a Plasma Processing Apparatus. This apparatus performs a plasma process on a target substrate using plasma, featuring first and second electrodes that oppose each other within a process chamber. An RF field is generated between these electrodes to turn a process gas into plasma through excitation. The apparatus includes an RF power supply connected to one of the electrodes via a matching circuit, which automatically adjusts input impedance for optimal RF power delivery. Additionally, a variable impedance setting section is integrated to manage backward-direction impedance against RF components from the plasma.
Another notable patent is a Method and System for Etching a High-k Dielectric Material. This method involves etching a high-k dielectric layer, such as HfO, on a substrate within a plasma processing system. The process requires elevating the substrate temperature above 200°C, introducing a halogen-containing process gas, igniting plasma, and exposing the substrate to this plasma. The inclusion of a reduction gas enhances the etch rate of HfO compared to Si and SiO.
Career Highlights
Nobuhiro Iwama is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His innovative work in plasma processing has positioned him as a key figure in advancing technology in this sector.
Collaborations
Iwama collaborates with notable colleagues, including Yohei Yamazawa and Manabu Iwata. Their combined expertise contributes to the development of cutting-edge technologies in plasma processing.
Conclusion
Nobuhiro Iwama's contributions to plasma processing technology through his patents and work at Tokyo Electron Limited highlight his role as an influential inventor in the field. His innovative approaches continue to shape advancements in semiconductor manufacturing processes.