Location History:
- Takefu, JP (1999)
- Fukushima, JP (2006 - 2008)
- Nishishirakawa-gun, JP (2008)
- Nishishirakawa, JP (2016)
- Nishigo-mura, JP (2016 - 2017)
Company Filing History:
Years Active: 1999-2025
Title: Nobuaki Mitamura: Innovator in Silicon Crystal Technology
Introduction
Nobuaki Mitamura is a prominent inventor based in Fukushima, Japan. He has made significant contributions to the field of silicon crystal manufacturing, holding a total of 13 patents. His work focuses on advancing technologies that enhance the quality and efficiency of silicon single crystal production.
Latest Patents
One of his latest patents is a single crystal manufacturing apparatus. This innovative apparatus includes a main chamber, pulling chamber, and a thermal shield member that faces a silicon melt. It features a rectifying cylinder that encloses the silicon single crystal being pulled up, along with a cooling cylinder that encircles the crystal. The design includes an extending portion that reaches toward the silicon melt, and a cooling auxiliary cylinder fitted inside the cooling cylinder. This configuration allows for the production of single crystals with a carbon concentration lower than conventional technologies.
Another notable patent is a method of producing silicon single crystal ingots. This method involves pulling the silicon single crystal ingot made of an N-region by the CZ method. It includes performing an EOSF inspection with heat treatment to reveal oxide precipitates and selective etching on a sample wafer. The process also involves shallow-pit inspections to identify defect regions, allowing for adjustments in pulling conditions to enhance the quality of the next silicon single crystal ingot.
Career Highlights
Nobuaki Mitamura is currently employed at Shin-Etsu Handotai Co., Ltd., a leading company in the semiconductor industry. His work has been instrumental in developing advanced manufacturing techniques that are crucial for the production of high-quality silicon crystals.
Collaborations
Throughout his career, Mitamura has collaborated with notable colleagues, including Masahiro Sakurada and Izumi Fusegawa. These collaborations have contributed to the advancement of technologies in the field of silicon crystal manufacturing.
Conclusion
Nobuaki Mitamura's innovative work in silicon crystal technology has led to significant advancements in the industry. His patents reflect a commitment to improving manufacturing processes and enhancing the quality of silicon products. His contributions continue to influence the field and pave the way for future innovations.