Nobuaki Hirose

Title: Nobuaki Hirose: Innovator in Defect Inspection Technology

Introduction

Nobuaki Hirose is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of defect inspection technology, holding a total of four patents. His work focuses on enhancing the precision of defect detection in various applications.

Latest Patents

Hirose's latest patents include a defect inspection apparatus and a defect inspection program. The objective of the defect inspection apparatus is to increase defect position precision and facilitate the alignment of coordinate origin offsets between a reviewing apparatus and the defect inspection apparatus. This is particularly useful when design data is unavailable or difficult to utilize. The apparatus acquires a wafer swath image necessary for inspection, detects defects, and calculates positional deviation amounts. It employs a template pattern from an arbitrary swath image to compare with multiple swath images of the entire wafer, allowing for accurate defect position correction.

Another notable patent is the defect inspection device, which aims to determine defect candidate positions more accurately than previous methods. This invention involves setting a reference die over a wafer, correcting position errors using reference patterns, and performing defect detection with the corrected images. These innovations significantly improve the accuracy of defect detection processes.

Career Highlights

Nobuaki Hirose is currently employed at Hitachi High-Tech Corporation, where he continues to develop advanced technologies in defect inspection. His expertise and innovative approach have positioned him as a key figure in his field.

Collaborations

Hirose collaborates with talented coworkers, including Takashi Hiroi and Takahiro Urano. Their combined efforts contribute to the advancement of defect inspection technologies.

Conclusion

Nobuaki Hirose's contributions to defect inspection technology through his patents and work at Hitachi High-Tech Corporation highlight his role as an influential inventor. His innovations continue to shape the future of defect detection in various industries.