Company Filing History:
Years Active: 2016
Title: Noboru Maeda: Innovator in Plasma Processing Technology
Introduction
Noboru Maeda is a distinguished inventor based in Miyagi, Japan. He is known for his contributions to the field of plasma processing technology. With a focus on enhancing the efficiency and effectiveness of plasma processing apparatuses, Maeda has made significant strides in this innovative area.
Latest Patents
Maeda holds a patent for a plasma processing apparatus. This apparatus features an upper electrode arranged within a processing chamber, which includes multiple gas supplying zones. The design incorporates a branch pipe with several branch parts and an addition pipe connected to at least one of these branches. The system is engineered to supply a processing gas, including a main gas, to the processing chamber through the gas supplying zones. The branch pipe effectively divides the processing gas based on a predetermined flow rate ratio, ensuring optimal distribution to the gas supplying zones. Additionally, the addition pipe is designed to introduce an adjustment gas, while the gas flow path connected to the branch part includes a bending portion to prevent gas concentration variations based on the molecular weight ratio of the adjustment gas to the main gas.
Career Highlights
Noboru Maeda is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at Tokyo Electron has allowed him to apply his innovative ideas and contribute to advancements in plasma processing technology.
Collaborations
Throughout his career, Maeda has collaborated with notable colleagues, including Yusei Kuwabara and Nobuaki Shindo. These collaborations have fostered a creative environment that encourages the development of cutting-edge technologies.
Conclusion
Noboru Maeda's contributions to plasma processing technology exemplify his innovative spirit and dedication to advancing the field. His patent for a plasma processing apparatus highlights his ability to solve complex engineering challenges. Maeda's work continues to influence the industry and inspire future innovations.