This inventor holds 1 USPTO granted patent. Top assignee: Sumitomo Electric Industries, Limited. Active years: 2004.
Company Filing History:
Years Active: 2004
Title: Noboru Gotou: Innovator in Diamond Wafer Technology
Introduction
Noboru Gotou is a prominent inventor based in Itami, Japan, known for his significant contributions to the field of microelectronics. He has developed innovative methods that enhance the processing of diamond wafers, which are crucial in various high-tech applications. His work has led to the filing of a patent that addresses critical challenges in the separation of chips from diamond wafers.
Latest Patents
Noboru Gotou holds a patent for a method for separating chips from a diamond wafer. This method involves a substrate, a chemically vapor-deposited diamond layer, and microelectronic elements, ensuring that the microelectronic components are protected from thermal damage and degradation caused by thermally decomposed cuttings during processing. The patent outlines several key steps: first, front-side grooves are formed on the diamond layer using high-output lasers such as YAG, CO2, or excimer lasers. These grooves are designed to have a depth ranging from 1/100 to 1.5 times the thickness of the diamond layer. Next, the thermally decomposed cuttings produced during laser processing are removed using plasma. Following this, back-side grooves are created on the substrate through dicing, ensuring alignment with the front-side grooves. Finally, the diamond wafer is divided into individual chips by applying mechanical stresses.
Career Highlights
Noboru Gotou is associated with Sumitomo Electric Industries, Limited, where he has been instrumental in advancing technologies related to diamond wafers. His innovative approach has not only contributed to the company's portfolio but has also positioned him as a key figure in the field of microelectronics.
Collaborations
Throughout his career, Noboru has collaborated with notable colleagues, including Satoshi Fujii and Tomoki Uemura. These collaborations have fostered an environment of innovation and have led to significant advancements in their respective fields.
Conclusion
Noboru Gotou's work in the development of methods for separating chips from diamond wafers showcases his expertise and commitment to innovation in microelectronics. His contributions continue to influence the industry and pave the way for future advancements.