Company Filing History:
Years Active: 2009
Title: Nobert Rosenkranz: Innovator in Microlithography Inspection Technology
Introduction
Nobert Rosenkranz is a notable inventor based in Reichenbach, Germany. He has made significant contributions to the field of microlithography, particularly in the inspection of objects such as masks used in the manufacturing of semiconductors. His innovative approach has led to the development of advanced technologies that enhance the precision and efficiency of inspection processes.
Latest Patents
Rosenkranz holds a patent for an "Arrangement for inspecting objects, especially masks in microlithography." This apparatus is designed to inspect objects that are placed within a vacuum chamber. The technology includes a converter that transforms illuminating radiation emitted from the object into radiation of a higher wavelength. Additionally, a sensor for recording images is positioned outside the vacuum chamber, serving as an optical interface between the vacuum chamber and the sensor of the converter. This design allows for at least one part of an image lens to function as a window in the vacuum chamber.
Career Highlights
Rosenkranz is associated with Carl Zeiss SMS Ltd., a company renowned for its expertise in optical systems and precision technology. His work at this esteemed organization has allowed him to collaborate with other talented professionals in the field.
Collaborations
Some of his notable coworkers include Hans-Juergen Dobschal and Wolfgang Harnisch. Their collective efforts contribute to the advancement of technologies in microlithography and related fields.
Conclusion
Nobert Rosenkranz's contributions to microlithography inspection technology exemplify the impact of innovative thinking in engineering. His patent and work at Carl Zeiss SMS Ltd. highlight his commitment to advancing the field. Through collaboration with skilled colleagues, he continues to push the boundaries of technology in this critical area.