Niranjana Balesan

Title: Niranjana Balesan: Inventor of a Substrate-Clamping Apparatus

Introduction

Niranjana Balesan is an inventor based in Fremont, California, and is associated with Applied Materials, Inc. Her patent work includes an apparatus designed to clamp a substrate on a monopolar electrostatic chuck during photoresist-film deposition. Balesan has 1 patent listed in the information provided.

Latest Patents

Balesan’s patent, “Apparatus for Clamping a Substrate on a Mono-Polar Electrostatic Chuck for Deposition of Photoresist Films,” describes a lift-pin assembly. The assembly includes a first metal spring, a metal component coupled above it, a second metal spring coupled above that component, another metal component, and a ceramic component at the top. The disclosed apparatus is intended to support substrate clamping during photoresist-film deposition.

Career Highlights

Balesan’s listed invention addresses equipment used in semiconductor manufacturing, particularly substrate handling and clamping during deposition processes. Her work is associated with Applied Materials, Inc., a company that develops equipment and technologies for the semiconductor industry.

Collaborations

The provided information identifies Ashutosh Sawant and Vijay D. Parkhe as Balesan’s coworkers. Their names are included here as professional associations; no specific joint patent contribution is stated in the supplied details.

Conclusion

Niranjana Balesan’s patent describes a lift-pin assembly for clamping substrates on a monopolar electrostatic chuck, reflecting a contribution to semiconductor manufacturing equipment.