The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2026
Filed:
Apr. 05, 2024
Applied Materials, Inc., Santa Clara, CA (US);
Sushim Koshti, West Linn, OR (US);
Vijay Parkhe, San Jose, CA (US);
Nitin Bharadwaj Satyavolu, Santa Clara, CA (US);
Venugopal Vellanki, San Jose, CA (US);
Niranjana Balesan, Fremont, CA (US);
Ashutosh Sawant, Santa Clara, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Apparatuses for clamping a substrate on a mono-polar electrostatic chuck for deposition of photoresist films are disclosed. In an example, a lift-pin assembly includes a first metal spring, a first metal above and coupled to the first metal spring, a second metal spring above and coupled to the first metal, a second metal above and coupled to the second metal spring, and a ceramic above and coupled to the second metal.