Company Filing History:
Years Active: 2005-2013
Title: Nicholas John Appleyard: Innovator in Plasma Processing Technologies
Introduction
Nicholas John Appleyard is a notable inventor based in Bristol, GB. He has made significant contributions to the field of plasma processing, holding two patents that showcase his innovative approach to substrate processing and plasma apparatus design.
Latest Patents
One of his latest patents is titled "Method of Processing Substrates." This invention relates to a method of processing substrates that includes etching a generally vertical structure in a substrate using a cyclic process. This process involves an etch step with a reactive etch gas and a deposition step for applying a protective polymer to the side walls of the structure. Additionally, it includes a cleaning step to remove deposited material from the chamber, ensuring efficient operation.
Another significant patent is "Plasma Processing Apparatus." This invention focuses on plasma processing apparatus, particularly inductively coupled plasma helicon or electron cyclotron resonance apparatus. The design features a plasma generation chamber situated above a process chamber, where a workpiece support is located. The apparatus includes coils that create magnetic mirrors to reflect electrons back towards the plasma zone, enhancing the efficiency of the plasma generation.
Career Highlights
Throughout his career, Nicholas has worked with several companies, including Trikon Holdings Limited and Aviza Technology Limited. His experience in these organizations has contributed to his expertise in plasma processing technologies and substrate processing methods.
Collaborations
Nicholas has collaborated with various professionals in his field, including his coworker Kevin Powell. Their joint efforts have likely fostered advancements in the technologies they have worked on together.
Conclusion
Nicholas John Appleyard is a distinguished inventor whose work in plasma processing has led to innovative patents that enhance substrate processing techniques. His contributions continue to influence the field and demonstrate the importance of innovation in technology.