Nicholas J Giammarco

Title: Innovations of Nicholas J Giammarco

Introduction

Nicholas J Giammarco is a notable inventor based in Newburgh, NY (US). He has made significant contributions to the field of semiconductor technology, holding a total of four patents. His work primarily focuses on processes that enhance the manufacturing of integrated circuits.

Latest Patents

One of his latest patents is titled "Mask using lithographic image size reduction." This patent discloses a process for reducing lithographic image size for integrated circuit manufacture. A mask of photosensitive material is formed on a substrate, with an opening of a minimum size dictated by the limits of lithography. The reduction in image size is achieved by establishing sidewalls to the interior vertical surfaces of the opening through the deposition of a conformal layer, followed by anisotropic etching. This process allows for the creation of a photomask/stencil with a pattern of openings smaller than what is possible by traditional lithography.

Another significant patent is the "RIE process for etching silicon isolation trenches and polycides." This patent reveals a process for etching semiconductor materials with a high etch rate against an insulator mask using a novel etchant gas mixture. The mixture includes chlorocarbon compounds, SF6, O2, and an inert gas like helium. The etch rate of silicon against an oxide mask using this gas mixture is notably high, achieving rates of 30-40, with the added benefit of shape control of trenches through manipulation of the RIE system power.

Career Highlights

Nicholas J Giammarco is currently employed at International Business Machines Corporation (IBM), where he continues to innovate in the semiconductor field. His work has been instrumental in advancing technologies that are critical to modern electronics.

Collaborations

Throughout his career, Giammarco has collaborated with notable colleagues, including George A Kaplita and Alexander Gimpelson. These collaborations have contributed to the development of cutting-edge technologies in the semiconductor industry.

Conclusion

Nicholas J Giammarco's contributions to semiconductor technology through his patents and work at IBM highlight his role as a significant inventor in the field. His innovative processes continue to influence the manufacturing of integrated circuits, showcasing the importance of his work in advancing technology.