Neil M P Benjamin

Title: **Innovator Spotlight: Neil M P Benjamin**

Introduction

Neil M P Benjamin is a notable inventor based in Palo Alto, California, with a focus on advancements in plasma technology and RF isolation in power circuitry. With a total of three patents to his name, Benjamin has made significant contributions to the field, especially through his work at Lam Research Corporation.

Latest Patents

Benjamin's latest patent, the **Compact High Density Plasma Source**, describes an RF antenna configured to inductively generate plasma within a specified chamber. This innovation utilizes an array of parallel conductive lines that operate in specific current flows to enable efficient plasma generation. The complex arrangement ensures that the first and second conductive lines carry current in opposite directions while maintaining the same direction in the second and third lines.

Another important patent is the **Ferrite Cage RF Isolator for Power Circuitry**, which introduces a ferrite cage surrounding a pair of coils, one linked to power input and the other to a load, such as a heater. This isolation mechanism eliminates the need for complicated filters, providing a more universal solution. The innovative design features dielectric discs supporting the coils, with ferrite pieces extending from the center to the periphery, enhancing the overall efficiency of the circuitry.

Career Highlights

Neil M P Benjamin has built a successful career at Lam Research Corporation, where he leverages his expertise in plasma technology. His work there has not only improved existing technologies but has also paved the way for future innovations in the semiconductor manufacturing industry.

Collaborations

Throughout his career, Benjamin has collaborated with talented colleagues such as Robert G O'Neill and Jie Zhang. These partnerships have contributed to the development of cutting-edge technologies and have fostered an environment of innovation within the company.

Conclusion

Neil M P Benjamin stands out as an influential inventor in the realm of plasma technology and RF isolation systems. His contributions through patents and extensive work at Lam Research Corporation demonstrate his commitment to advancing technology. As he continues to innovate, his impact on the industry will undoubtedly grow.