Company Filing History:
Years Active: 1998-2004
Title: Natraj Narayanswami: Innovator in Microelectronic Cleaning Technologies
Introduction
Natraj Narayanswami is a notable inventor based in Eden Prairie, MN (US). He has made significant contributions to the field of microelectronics through his innovative cleaning methods. With a total of 2 patents, Narayanswami has developed advanced techniques that enhance the cleaning processes of microelectronic substrates.
Latest Patents
Narayanswami's latest patents include groundbreaking methods for cleaning microelectronic substrates using ultradilute cleaning liquids. This method involves cleaning a surface of an article with cleaning liquids combined with acoustic energy. An ultradilute concentration of a cleaning enhancement substance, such as ammonia gas, is dissolved in a liquid solvent, like filtered deionized water, to create an effective cleaning liquid. The cleaning liquid is applied to the surface, while acoustic energy is utilized during the cleaning process. Additionally, the surface can be oxidized using ozonated water prior to cleaning.
Another significant patent is the aerodynamic aerosol chamber, which is an aerosol cleaning apparatus designed to treat substrates effectively. This invention prevents contaminant recirculation by controlling the post-impingement exhaust flow through the aerodynamic behavior of the contaminant-laden exhaust stream. The design divides the post-impingement exhaust flow into two streams, ensuring that contaminants are efficiently removed from the surface of semiconductor wafers.
Career Highlights
Narayanswami is currently associated with FSI International, Inc., where he continues to innovate in the field of microelectronics. His work has been instrumental in developing cleaning technologies that are crucial for maintaining the integrity of microelectronic devices.
Collaborations
Throughout his career, Narayanswami has collaborated with notable colleagues, including Thomas J. Wagener and Kevin L. Siefering. These collaborations have further enhanced the development and implementation of his innovative cleaning methods.
Conclusion
Natraj Narayanswami's contributions to microelectronic cleaning technologies have established him as a key figure in the industry. His innovative patents reflect a commitment to advancing the field and improving cleaning processes for microelectronic substrates.