Namsung Kim

Title: The Innovative Mind of Namsung Kim: Pioneering Advances in Device Isolation Technologies

Introduction

Namsung Kim, located in Sunnyvale, CA, is a distinguished inventor with a remarkable portfolio of three patents. His innovative contributions focus primarily on device isolation techniques essential for modern semiconductor technologies. With a career that spans esteemed institutions and collaborations, Kim continues to push the boundaries of innovation in his field.

Latest Patents

Namsung Kim's latest patents reflect his expertise in advanced semiconductor manufacturing processes. The first, titled "Selective oxidation for 3D device isolation," outlines methods and device structures related to horizontal gate all around (hGAA) isolation and fin field effect transistor (FinFET) isolation. This invention describes a superlattice structure formed on a substrate, where one of the layers is oxidized by a high-pressure oxidation process, leading to the formation of a buried oxide layer adjacent to the substrate.

The second patent, "Selective deposition of metal silicides," addresses selective metal silicide deposition methods. This involves heating a substrate with a silicon-containing surface, which is then hydrogen-terminated. Kim presents a process of exposing the substrate to cycles of a MoF precursor and a SiH precursor, followed by further SiH overexposure to deposit MoSi material on the silicon surface. This method also includes techniques for selective native oxide removal, enhancing the efficiency of the process without damaging bulk oxides.

Career Highlights

Namsung Kim has significantly contributed to the field of semiconductor technology through his work with prominent companies and institutions. He has held key positions at Applied Materials, Inc. and the University of California. His work focuses on enhancing technological efficiencies and introducing innovations that streamline device fabrication processes.

Collaborations

Throughout his career, Kim has collaborated with esteemed colleagues such as Srinivas D. Nemani and Raymond Hoiman Hung. Their collective expertise has propelled advancements in semiconductor technologies, leading to influential patents and research initiatives.

Conclusion

Namsung Kim's innovative spirit and dedication to excellence in device isolation technologies have positioned him as a notable figure in the semiconductor industry. His patents not only contribute to the field but also serve as a foundation for future innovations in electronics. As he continues to explore new frontiers, Kim's work promises to have a lasting impact on the technology landscape.