For the Inventor, By the Inventor

Enter inventor name

Mutsumi Tanikawa

USPTO Granted Patents = 8

EPO Patents = 1

Average Co-Inventor Count = 3.3

ph-index = 5

Forward Citations = 69(Granted Patents)

Location History:

Kanagawa-ken, JP (2001)
Yokohama, JP (2002 - 2003)
Tokyo, JP (2002 - 2017)

Company Filing History:

Ebara Corporation

1 out of 832,680

Other

patents

Years Active: 2001-2017

Loading Chart...

Loading Chart...

8 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 9533395 - Method and apparatus for conditioning a polishing pad (2017-01-03),

2. 9469013 - Method and apparatus for conditioning a polishing pad (2016-10-18),

3. 9156130 - Method of adjusting profile of a polishing member used in a polishing apparatus, and polishing apparatus (2015-10-13),

4. 9108292 - Method of obtaining a sliding distance distribution of a dresser on a polishing member, method of obtaining a sliding vector distribution of a dresser on a polishing member, and polishing apparatus (2015-08-18),

5. 6508695 - Pure water reusing system (2003-01-21),

6. 6358125 - Polishing liquid supply apparatus (2002-03-19),

7. 6338671 - Apparatus for supplying polishing liquid (2002-01-15),

8. 6280300 - Filter apparatus (2001-08-28),

This text is generated by artificial intelligence and may not be accurate.

Please report any incorrect information to support@idiyas.com

Loading…