The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2015
Filed:
Feb. 21, 2014
Applicant:
Ebara Corporation, Tokyo, JP;
Inventors:
Takahiro Shimano, Tokyo, JP;
Mutsumi Tanikawa, Tokyo, JP;
Hisanori Matsuo, Tokyo, JP;
Kuniaki Yamaguchi, Tokyo, JP;
Katsuhide Watanabe, Tokyo, JP;
Assignee:
Ebara Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 53/017 (2012.01); B24B 37/005 (2012.01);
U.S. Cl.
CPC ...
B24B 53/017 (2013.01); B24B 37/005 (2013.01);
Abstract
The method includes the steps of measuring a surface height of a polishing memberat each of plural oscillation sections Z1 to Z5 which are defined in advance on the polishing memberalong an oscillation direction of a dresser; calculating a difference between a current profile obtained from measured values of the surface height and a target profile of the polishing member; and correcting moving speeds of the dresserin the plural oscillation sections Z1 to Z5 so as to eliminate the difference.