Machida, Japan

Munekazu Matsuo



Average Co-Inventor Count = 6.0

ph-index = 1

Forward Citations = 1(Granted Patents)


Company Filing History:


Years Active: 2008

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1 patent (USPTO):Explore Patents

Title: **Innovations by Munekazu Matsuo: A Pioneer in Plasma Processing Technology**

Introduction

Munekazu Matsuo, based in Machida, Japan, is a remarkable inventor known for his significant contributions to the field of plasma processing technology. With a passion for innovation, Matsuo has developed a specialized apparatus that has the potential to transform various applications in the industry.

Latest Patents

Matsuo holds a patent for a "Microwave-excited Plasma Processing Apparatus." This innovative technology demonstrates a wide pressure range and an extensive applicable electric power range for normal electric discharges. The unique design features slits cut through a rectangular waveguide, which allow for the formation of uniform electric and magnetic fields right below the microwave introducing window. Specifically, the apparatus boasts four elliptic slits arranged along the sides of a substantial square, enhancing its efficiency and functionality.

Career Highlights

Matsuo is affiliated with Ulvac, Inc., where he continues to delve into advancements in plasma processing. His work has garnered attention within the scientific community, showcasing his dedication to enhancing manufacturing processes. The patent for his microwave-excited plasma processing apparatus stands as a testament to his innovative spirit and technical expertise.

Collaborations

Throughout his career, Matsuo has collaborated with prominent colleagues such as Yoji Taguchi and Maiko Yoshida. These partnerships enable a dynamic exchange of ideas, furthering advancements in their respective fields of research and application.

Conclusion

Munekazu Matsuo's journey as an inventor exemplifies the impact of innovation in technology. His patent for the microwave-excited plasma processing apparatus not only highlights his ingenuity but also contributes to the evolution of industrial applications. As the field of plasma processing continues to grow, Matsuo remains a crucial figure in spearheading new advancements that can shape the future of technology.

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