This inventor holds 1 USPTO granted patent. Top assignee: Infineon Technologies Richmond, LP. Active years: 2004.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2004
Title: Mukund Patel: Innovator in Borosilicate Glass Film Technology
Introduction
Mukund Patel is a notable inventor based in Glen Allen, VA (US). He has made significant contributions to the field of semiconductor technology, particularly through his innovative methods for depositing borosilicate glass films.
Latest Patents
Mukund Patel holds 1 patent for his invention titled "Rapid deposition of borosilicate glass films." This patent describes a method for rapidly depositing a borosilicate glass film on a semiconductor wafer. The process involves controlling the pressure within the chamber, introducing oxygen and a carrier gas, injecting triethyl borate (TEB) and tetraethyl orthosilicate (TEOS), stabilizing the injection of these materials, adjustably spacing a heater relative to the chamber, introducing ozone gas, and achieving a deposition rate of at least about 4,500 angstroms per minute.
Career Highlights
Mukund Patel is currently employed at Infineon Technologies Richmond, LP, where he continues to advance his research and development efforts in semiconductor technologies. His work has been instrumental in enhancing the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
Mukund collaborates with Shrinivas Govindarajan, contributing to the innovative environment at Infineon Technologies.
Conclusion
Mukund Patel's contributions to the field of semiconductor technology through his patent on borosilicate glass films exemplify his innovative spirit and dedication to advancing technology. His work continues to impact the industry positively.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile