This inventor holds 1 USPTO granted patent and 7 published patent applications. Top assignee: Taiwan Semiconductor Manufacturing Co., Ltd.. Active years: 2026.
Company Filing History:
Years Active: 2026
Title: Mu-Chieh Chang: Innovator in Semiconductor Technology
Introduction: Mu-Chieh Chang is a talented inventor based in Zhubei City, Taiwan. She has made significant contributions to the field of semiconductor technology through her innovative approaches and methods. Although she currently holds no granted patents, her work in developing new techniques showcases her expertise and dedication to advancing technology.
Latest Patent Applications: Mu-Chieh Chang's latest patent applications include "INNER SPACER FORMATION THROUGH STIMULATION." This method involves forming a stack of layers that includes a plurality of semiconductor nanostructures and sacrificial layers arranged alternately. The process further includes laterally recessing the sacrificial layers to create lateral recesses, depositing a spacer layer into these recesses, trimming the spacer layer to form inner spacers, and performing a treatment process to reduce the dielectric constant values of the inner spacers. Another application is titled "TRANSISTOR PROTECTION LAYERS AND METHODS OF FORMING THE SAME." This method includes exposing a semiconductor nanostructure and a dummy nanostructure by removing a dummy gate, increasing deposition selectivity between the surfaces of the semiconductor nanostructure and the isolation region, and depositing a protection layer on the isolation region's surface. The process also involves selectively etching the dummy nanostructure at a faster rate than the protection material, ultimately forming a gate structure around the semiconductor nanostructure.
Conclusion: Mu-Chieh Chang's innovative work in semiconductor technology highlights her potential as an inventor. Her latest patent applications demonstrate her commitment to advancing the field and contribute to the ongoing development of new technologies.