Motoyuki Shimai

Title: Motoyuki Shimai: Innovator in Substrate Processing Technology

Introduction

Motoyuki Shimai is a prominent inventor based in Kyoto, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 6 patents. His innovative designs and solutions have advanced the efficiency and effectiveness of substrate processing devices.

Latest Patents

Among his latest patents, one notable invention is a substrate processing apparatus. This apparatus features a supply flow passage that branches into multiple upstream flow passages. These upstream passages include a branching upstream flow passage that further divides into several downstream flow passages. The design incorporates multiple discharge ports, which are strategically positioned at varying distances from a rotational axis. These ports discharge processing liquids onto the upper surface of a substrate held by a substrate holding unit.

Another significant patent is a substrate processing device that includes a heater positioned between the substrate and the spin base. This device consists of a spin base located beneath a substrate grasped by several chuck members. The spin base transmits the drive force of a spin motor to the chuck members. Additionally, a nozzle supplies processing fluid to the top and/or bottom surfaces of the substrate. The device features an IH heating mechanism, which includes a heat-generating member situated between the substrate and the spin base, along with a heating coil located below the spin base. An IH circuit supplies electric power to the heating coil, generating an alternating magnetic field that causes the heat-generating member to produce heat.

Career Highlights

Motoyuki Shimai has built a successful career at Screen Holdings Co., Ltd., where he continues to innovate and develop advanced substrate processing technologies. His work has been instrumental in enhancing the capabilities of substrate processing devices, making them more efficient and effective for various applications.

Collaborations

Throughout his career, Shimai has collaborated with talented individuals such as Akito Hatano and Kenji Kobayashi. These collaborations have fostered a creative environment that has led to the development of groundbreaking technologies in the field.

Conclusion

Motoyuki Shimai is a distinguished inventor whose contributions to substrate processing technology have made a lasting impact. His innovative patents and collaborative efforts continue to shape the future of this field.