The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2019
Filed:
Feb. 23, 2016
Screen Holdings Co., Ltd., Kyoto, JP;
Jun Sawashima, Kyoto, JP;
Akito Hatano, Kyoto, JP;
Kenji Kobayashi, Kyoto, JP;
Yuta Nishimura, Kyoto, JP;
Motoyuki Shimai, Kyoto, JP;
Toyohide Hayashi, Kyoto, JP;
SCREEN Holdings Co., Ltd., , JP;
Abstract
A supply flow passage branches into a plurality of upstream flow passages. A plurality of discharge ports are respectively disposed at a plurality of positions differing in distance from a rotational axis of a substrate. A return flow passage is connected to the upstream flow passage. A downstream heater heats liquid flowing through the upstream flow passage. A downstream switching unit supplies the liquid, supplied to the plurality of upstream flow passages from the supply flow passage, to one of the plurality of discharge ports and the return flow passage, selectively.