Company Filing History:
1 out of 2,874 
1 out of 1,134 
Years Active: 2017-2023
Title: Motonobu Hommi: Innovator in Charged Particle Beam Technology
Introduction
Motonobu Hommi is a distinguished inventor based in Tokyo, Japan. He has made significant contributions to the field of charged particle beam technology, holding a total of 2 patents. His innovative work focuses on enhancing the efficiency and accuracy of pattern measurement and evaluation processes.
Latest Patents
One of Hommi's latest patents is a charged particle beam device designed to shorten the time required for recipe evaluation while minimizing data increase. This device includes a microscope that scans a charged particle beam on a sample, detects secondary particles emitted from the sample, and outputs a detection signal. A computer system generates frame images based on the detection signal and processes these images to calculate moment images and feature amount data.
Another notable patent is a pattern measurement device and computer program aimed at evaluating patterns based on centroids. This invention provides a method for quantitatively assessing patterns formed using a directed self-assembly (DSA) method with high accuracy. The device measures distances between patterns in a sample, determines the centroids of multiple patterns, and distinguishes patterns meeting specific conditions from others.
Career Highlights
Motonobu Hommi has worked with prominent companies such as Hitachi High-Technologies Corporation and Hitachi High-Tech Corporation. His experience in these organizations has allowed him to develop and refine his innovative technologies in charged particle beam applications.
Collaborations
Hommi has collaborated with notable coworkers, including Satoru Yamaguchi and Akiyuki Sugiyama. Their combined expertise has contributed to advancements in the field of charged particle beam technology.
Conclusion
Motonobu Hommi's contributions to charged particle beam technology and pattern measurement have established him as a key figure in his field. His innovative patents reflect a commitment to enhancing the efficiency and accuracy of scientific evaluations.