This inventor holds 2 USPTO granted patents. Top assignees: Mitsubishi Denki Kabushiki, Mitsubishi Denki Kabushiki Kaisha, Sumitomo Sitix Corporation. Active years: 1999-2001.
Company Filing History:
1 out of 26 
1 out of 21,351 
1 out of 40 Years Active: 1999-2001
Title: Morihiko Kume: Innovator in Semiconductor Processing
Introduction
Morihiko Kume is a notable inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor processing, holding 2 patents that reflect his innovative approach to technology.
Latest Patents
Kume's latest patents include a method for processing semiconductor substrates. This method aims to form an oxide film that is less prone to impurities affecting semiconductor characteristics. The process involves treating an RCA-cleaned semiconductor substrate with diluted hydrofluoric acid to remove the native oxide film formed during cleaning. The treatment conditions specify a hydrofluoric acid concentration of about 50%, with a ratio of hydrofluoric acid to pure water of 1:100, and a processing time of approximately one minute. After treatment, the substrate is stored in a clean atmosphere of oxygen to form the oxide film, with oxygen levels ranging from 20% to 100%.
Another significant patent is related to a semiconductor wafer evaluating method and semiconductor device manufacturing method. This innovation reduces turn-around time and eliminates the need for process apparatus and dielectric breakdown characteristic evaluation devices. The method involves etching a sample wafer using an SC-1 solution bath to convert process defects into pits. The number of pits is then detected using a dust particle inspection system, allowing for the evaluation of the dielectric breakdown characteristic based on previously established relations.
Career Highlights
Throughout his career, Morihiko Kume has worked with prominent companies such as Mitsubishi Electric Corporation and Sumitomo Sitix Corporation. His experience in these organizations has contributed to his expertise in semiconductor technology.
Collaborations
Kume has collaborated with notable colleagues, including Yasuhiro Kimura and Tsuneaki Fujise. These partnerships have likely enhanced his research and development efforts in the semiconductor field.
Conclusion
Morihiko Kume's contributions to semiconductor processing through his innovative patents demonstrate his commitment to advancing technology. His work continues to influence the industry and pave the way for future developments in semiconductor manufacturing.