Moon-hee Lee

Title: Innovations of Moon-hee Lee: A Pioneer in Semiconductor Manufacturing

Introduction

Moon-hee Lee, an accomplished inventor based in Suwon, South Korea, has made significant contributions to the field of semiconductor manufacturing. With a portfolio of seven patents to his name, he has been instrumental in developing innovative methods that enhance the efficiency and effectiveness of semiconductor processing.

Latest Patents

Among Moon-hee Lee's notable patents is a pioneering method for removing oxide layers from silicon wafers. This method not only targets natural oxide layers but also employs a sophisticated semiconductor manufacturing apparatus that utilizes a vertically movable susceptor. By exhausting air to create a vacuum and supplying a plasma hydrogen gas combined with a fluorine-containing gas, a chemical reaction occurs, resulting in a reaction layer that can be vaporized and efficiently removed. This process ensures high selectivity, preventing damage or contamination to the underlying layers.

Another significant patent involves a cleaning apparatus designed to remove contaminants from substrate surfaces. This innovative system comprises two functional parts: one generates an aerosol of frozen particles that mechanically removes contaminants, while the second part directs a fluid containing gaseous reactants to chemically eliminate organic contaminants. By separating the physical and chemical cleaning processes, the effectiveness of the cleaning operation is maximized, marking a notable advancement in substrate maintenance.

Career Highlights

Moon-hee Lee is currently associated with Samsung Electronics Co., Ltd., where he utilizes his expertise to drive technological advancements within the semiconductor industry. His work is pivotal to the company's ongoing commitment to innovation and excellence.

Collaborations

Throughout his career, Moon-hee Lee has collaborated with talented professionals such as Kun-tack Lee and Woo-gwan Shim. These partnerships have contributed to a dynamic working environment that fosters creativity and nurtures groundbreaking inventions.

Conclusion

Moon-hee Lee stands out as a remarkable inventor whose patents are shaping the future of semiconductor manufacturing. His innovative approaches to addressing complex challenges in the field underscore his status as a leader in technological advancement. As the semiconductor industry continues to evolve, the contributions of inventors like Moon-hee Lee will remain pivotal in driving the next wave of innovations.