Moon Eon Lee

Title: Innovations by Moon Eon Lee

Introduction

Moon Eon Lee is a notable inventor based in Yongin-si, South Korea. He has made significant contributions to the field of plasma processing technology. His work is particularly recognized for its application in semiconductor manufacturing.

Latest Patents

Moon Eon Lee holds a patent for a "Plasma processing apparatus and method for dechucking wafer in the plasma processing apparatus." This innovative apparatus includes a chamber where plasma processes are performed. It features an electrostatic chuck that supports a wafer, comprising a first portion and a second portion. The design includes a first electrode and a second electrode, which are strategically positioned to enhance the efficiency of the plasma processing. Additionally, the apparatus is equipped with a power supply to apply voltage to the electrodes and multiple cooling gas supply lines to maintain optimal wafer temperature.

Career Highlights

Moon Eon Lee is currently employed at Samsung Electronics Co., Ltd., a leading company in the electronics industry. His work at Samsung has allowed him to contribute to advancements in semiconductor technology. His innovative approach has positioned him as a key figure in the development of plasma processing techniques.

Collaborations

Moon Eon Lee has collaborated with talented coworkers, including Yi Rop Kim and Kui Hyun Yoon. These collaborations have fostered a creative environment that encourages innovation and the development of cutting-edge technologies.

Conclusion

Moon Eon Lee's contributions to plasma processing technology exemplify the importance of innovation in the semiconductor industry. His patent and work at Samsung Electronics Co., Ltd. highlight his role as a significant inventor in this field.