Mohsen Mahvash

Title: Mohsen Mahvash: Innovator in X-ray Scatterometry Measurements

Introduction

Mohsen Mahvash is a notable inventor based in San Jose, California. He has made significant contributions to the field of X-ray scatterometry through his innovative patent. His work focuses on employing machine learning techniques to enhance the efficiency of electromagnetic response modeling.

Latest Patents

Mohsen Mahvash holds a patent titled "Methods and systems for x-ray scatterometry measurements employing a machine learning based electromagnetic response model." This patent describes methods and systems for estimating values of parameters of interest from X-ray scatterometry measurements with reduced computational effort. The approach utilizes regression techniques with a trained machine learning-based electromagnetic response model. The training data set comprises Design Of Experiments (DOE) values of parameters of interest and corresponding electromagnetic response metrics. In various examples, the values of parameters are determined from measured images through regression using a sequence of trained machine learning models. Additionally, input values for training the model are scaled based on output variation.

Career Highlights

Mohsen Mahvash has established himself as a key figure in his field, particularly through his work at Kla Corporation. His innovative approach to X-ray scatterometry has positioned him as a leader in the application of machine learning in this area.

Collaborations

Mohsen collaborates with Samad Jafarzanjani, contributing to advancements in their shared field of expertise.

Conclusion

In summary, Mohsen Mahvash is a pioneering inventor whose work in X-ray scatterometry and machine learning has the potential to significantly impact the industry. His contributions reflect a commitment to innovation and efficiency in scientific measurements.