Location History:
- Sunnyvale, CA (US) (2000 - 2001)
- Cupertino, CA (US) (1998 - 2003)
Company Filing History:
Years Active: 1998-2003
Title: The Innovative Contributions of Mohan K Bhan
Introduction
Mohan K Bhan is a prominent inventor based in Cupertino, California, known for his significant contributions to the field of integrated circuit technology. With a total of 14 patents to his name, he has made remarkable advancements that have influenced the semiconductor industry.
Latest Patents
Among his latest patents is a method of forming contact structures using a nitrogen trifluoride preclean etch process combined with a titanium chemical vapor deposition step. This innovative method involves forming a dielectric layer over a silicon substrate, etching a contact hole through the dielectric layer, and exposing the etched contact hole to a plasma formed from a preclean gas comprising nitrogen trifluoride and helium. Following this, a titanium layer is deposited within the contact hole using a plasma CVD process, which heats the substrate to a temperature of 650 degrees Celsius or less. Another notable patent focuses on the chemical vapor deposition of copper using a profiled distribution of showerhead apertures. This showerhead is designed to dispense gas over a wafer during the CVD process, particularly for copper deposition. The tailored patterns of holes compensate for thermal effects, enhancing the efficiency of the process.
Career Highlights
Mohan K Bhan is currently employed at Applied Materials, Inc., a leading company in the semiconductor manufacturing equipment industry. His work has been instrumental in developing technologies that improve the efficiency and effectiveness of semiconductor fabrication processes.
Collaborations
Throughout his career, Mohan has collaborated with notable colleagues, including Anand Gupta and Sudhakar Subrahmanyam. These collaborations have fostered an environment of innovation and have contributed to the successful development of various technologies.
Conclusion
Mohan K Bhan's contributions to the field of integrated circuits and semiconductor technology are significant and impactful. His innovative patents and collaborative efforts continue to shape the future of the industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.