The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2001
Filed:
Apr. 06, 1998
Xin Sheng Guo, Los Altos Hills, CA (US);
Mohan Bhan, Cupertino, CA (US);
Justin Jones, San Francisco, CA (US);
Lawrence Lei, Milpitas, CA (US);
Russell Ellwanger, Carmel, CA (US);
Mei Chang, Saratoga, CA (US);
Ashok Sinha, Palo Alto, CA (US);
Avi Tepman, Cupertino, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
The invention provides a substrate support member and a purge guide for directing purge gas past the edge of a substrate and towards the outer perimeter of the chamber. The purge guide includes a plurality of holes disposed around the inner perimeter thereof to provide a purge gas passage and to prevent purge gas from interfering with the deposition chemistry on the surface of the substrate. A substrate support member is also provided having a vacuum chuck for securing a substrate to the upper surface thereof. The substrate support member preferably includes a shoulder on which the purge guide is supported during processing. The invention also provides a method for shielding an edge of a substrate by flowing a purge gas adjacent the edge of the substrate and then through a plurality of purge holes on a purge guide.