Company Filing History:
Years Active: 2021
Title: Innovations of Mohammadreza Nematollahi
Introduction
Mohammadreza Nematollahi is a notable inventor based in Eindhoven, Netherlands. He has made significant contributions to the field of microlithography, particularly through his innovative patent related to deformable mirrors.
Latest Patents
Nematollahi holds a patent for a "Mirror for a microlithographic projection exposure apparatus, and method for operating a deformable mirror." This invention includes an optical effective surface, a mirror substrate, and a reflection layer stack designed to reflect electromagnetic radiation. The patent also describes a piezoelectric layer that allows for locally variable deformation, enhancing the functionality of the mirror in advanced lithographic applications.
Career Highlights
He is currently employed at Carl Zeiss SMT GmbH, a leading company in the field of optical systems and technologies. His work focuses on developing cutting-edge solutions that improve the precision and efficiency of microlithographic processes.
Collaborations
Nematollahi has collaborated with esteemed colleagues such as Johannes Lippert and Toralf Gruner, contributing to the advancement of technology in their field.
Conclusion
Mohammadreza Nematollahi's innovative work in microlithography exemplifies the impact of advanced technology on modern manufacturing processes. His contributions continue to shape the future of optical systems.