This inventor holds 1 USPTO granted patent. Top assignee: Hitachi, Ltd.. Active years: 1999.
Company Filing History:
Years Active: 1999
Title: Mitsuru Katamoto: Innovator in Microwave Plasma Processing
Introduction
Mitsuru Katamoto is a notable inventor based in Kudamatsu, Japan. He has made significant contributions to the field of microwave plasma processing, showcasing his expertise through innovative inventions.
Latest Patents
Katamoto holds a patent for a "Microwave plasma processing apparatus and method." This invention relates to a microwave plasma processing apparatus that is designed for generating plasma using microwaves. The apparatus utilizes a circular waveguide where microwaves are tuned by a microwave tuner to match the impedance. This allows for the efficient introduction of microwaves into a discharge block, which has a plasma-resistant inner surface. The processing gas is controlled to a predetermined pressure and is converted into a more uniform and dense plasma through the interaction of the microwave electric field and a magnetic field produced by a solenoid coil.
Career Highlights
Mitsuru Katamoto is associated with Hitachi, Ltd., a leading company in technology and innovation. His work has been instrumental in advancing microwave plasma processing technologies, which have applications in various industries.
Collaborations
Katamoto has collaborated with notable coworkers, including Yoshiaki Sato and Hironobu Kawahara. Their combined efforts have contributed to the development of advanced technologies in the field.
Conclusion
Mitsuru Katamoto's contributions to microwave plasma processing highlight his innovative spirit and dedication to advancing technology. His patent and work at Hitachi, Ltd. reflect his significant impact in the field.