Location History:
- Kumamoto-ken, JP (2001 - 2002)
- Tamana-gun, JP (2002)
- Kumamoto, JP (2003 - 2004)
- Koshi, JP (2010)
Company Filing History:
Years Active: 2001-2010
Title: Innovations by Mitsuhiro Tanoue
Introduction
Mitsuhiro Tanoue is a prominent inventor based in Kumamoto, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 8 patents. His work focuses on enhancing the efficiency and effectiveness of substrate carrying and processing apparatuses.
Latest Patents
One of his latest inventions is a substrate carrying and processing apparatus designed to minimize the storage space required for substrates. This innovation aims to downsize the apparatus while increasing the number of substrates that can be stored, ultimately enhancing throughput. The apparatus features a carrier block that positions carriers for wafers, a processing block with units for wafer processing, and a rack unit that stores wafers to be processed. The design allows for efficient transfer of wafers through the use of main arms and transfer arms, which can operate in overlapping vertical directions.
Another notable patent is related to a coating and developing apparatus and method. This invention includes a processing block with unit blocks for forming coating films and layers for the developing process. The design incorporates transfer sections that facilitate the movement of wafers, reducing the load on the main arms and improving carrying throughput.
Career Highlights
Mitsuhiro Tanoue is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has allowed him to develop innovative solutions that address the challenges faced in substrate processing.
Collaborations
Throughout his career, Tanoue has collaborated with notable coworkers, including Tetsuya Oda and Toshichika Takei. These collaborations have contributed to the advancement of technology in their field.
Conclusion
Mitsuhiro Tanoue's contributions to substrate processing technology through his patents and innovations have significantly impacted the industry. His work continues to pave the way for advancements in efficiency and effectiveness in substrate handling and processing.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.