Company Filing History:
Years Active: 2004-2007
Title: Mitsuhiro Kaburaki: Innovator in Semiconductor Processing Technology
Introduction
Mitsuhiro Kaburaki is a notable inventor based in Narita, Japan. He has made significant contributions to the field of semiconductor processing, holding 2 patents that enhance power coupling through substrates in wafer processing systems.
Latest Patents
Kaburaki's latest patents include a "Process kit for improved power coupling through a workpiece in a semiconductor wafer processing system." This invention features an apparatus designed to support a substrate, such as a semiconductor wafer, within a process chamber. The apparatus includes a pedestal assembly and a pedestal cover that electrically isolates the pedestal assembly. This design effectively reduces conductive film growth in the wafer process region, ensuring that RF wafer biasing power remains coupled through the substrate during processing. Another patent, titled "Apparatus for improved power coupling through a workpiece in a semiconductor wafer processing system," shares similar features and benefits, further showcasing his innovative approach to semiconductor technology.
Career Highlights
Mitsuhiro Kaburaki is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His work focuses on developing advanced technologies that improve the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
Kaburaki has collaborated with notable colleagues, including Bradley Owen Stimson and John C. Forster, contributing to a dynamic work environment that fosters innovation and technological advancement.
Conclusion
Mitsuhiro Kaburaki's contributions to semiconductor processing technology through his patents and work at Applied Materials, Inc. highlight his role as a key innovator in the field. His inventions continue to influence the efficiency of semiconductor manufacturing processes.