Location History:
- Yatsushiro, JP (1997 - 2003)
- Kumamoto-ken, JP (2002 - 2004)
Company Filing History:
Years Active: 1997-2004
Title: Mitiaki Matsushita: Innovator in Substrate Processing Technology
Introduction
Mitiaki Matsushita is a prominent inventor based in Kumamoto-ken, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 6 patents. His work focuses on improving the efficiency and effectiveness of substrate processing systems.
Latest Patents
Matsushita's latest patents include a substrate processing apparatus and a substrate processing method. The substrate processing apparatus features a processing section designed to perform various processing tasks for substrates. It includes a substrate carrier transfer section that facilitates the movement of a substrate carrier holding multiple substrates. Additionally, a substrate transfer mechanism is incorporated to take unprocessed substrates from the carrier and deliver them to the processing section, while also returning processed substrates back to the carrier.
Another notable patent is the substrate transfer system, which consists of a cassette table for mounting a cassette with an opening for substrate loading and unloading. This system includes a transfer arm mechanism that efficiently handles the substrates, ensuring a seamless transfer between the cassette and processing units. The design also incorporates partition members to maintain a controlled atmosphere during the transfer process.
Career Highlights
Mitiaki Matsushita is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His innovative work has positioned him as a key figure in the development of advanced substrate processing technologies.
Collaborations
Matsushita has collaborated with notable coworkers, including Issei Ueda and Kazuhiko Ito. Their combined expertise has contributed to the advancement of substrate processing systems and technologies.
Conclusion
Mitiaki Matsushita's contributions to substrate processing technology have made a significant impact in the industry. His innovative patents and collaborative efforts continue to drive advancements in this critical field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.