Company Filing History:
Years Active: 2020-2025
Title: Minoru Tashiro: Innovator in Substrate Processing Technologies
Introduction
Minoru Tashiro is a prominent inventor based in Kumamoto, Japan. He has made significant contributions to the field of substrate processing technologies, holding a total of 3 patents. His work focuses on enhancing the efficiency and effectiveness of liquid processing apparatuses.
Latest Patents
Tashiro's latest patents include a substrate liquid processing apparatus and a liquid discharge evaluation method. This innovative controller is designed to manage liquid supply, allowing for continuous adjustments to the landing position of the liquid on a substrate's surface. It achieves this by discharging liquid from a first nozzle while the nozzle is in motion. The controller also derives discharge position deviation information by comparing temperature data collected during the nozzle's movement along different paths.
Another notable patent is the substrate storage apparatus, which features a stage for a cassette with a detachable lid. This apparatus includes a lid attaching/detaching plate that can move between a contact position and a retracted position. It is equipped with a lid holding sensor that detects whether the lid is being held, allowing the controller to determine any abnormalities related to the lid's attachment or detachment.
Career Highlights
Minoru Tashiro is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has been instrumental in advancing substrate processing technologies.
Collaborations
Tashiro collaborates with notable colleagues, including Akihiro Matsumoto and Michiaki Matsushita. Their combined expertise contributes to the innovative projects at Tokyo Electron Limited.
Conclusion
Minoru Tashiro's contributions to substrate processing technologies through his patents and work at Tokyo Electron Limited highlight his role as a key innovator in the field. His advancements continue to influence the industry and pave the way for future innovations.