This inventor holds 1 USPTO granted patent and 1 EPO patent. Top assignee: Chinese Academy of Sciences. Active years: 2017.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2017
Title: The Innovative Contributions of Mingxing Chen
Introduction
Mingxing Chen is a prominent inventor based in Shanghai, China. He has made significant contributions to the field of illumination devices, particularly in the context of projection lithography machines. His innovative work has led to the development of a unique illumination device that enhances the efficiency and effectiveness of lithographic processes.
Latest Patents
Mingxing Chen holds a patent for an illumination device and method for using the same in the projection lithography machine. This device comprises a laser source, a beam expander, a micromirror array with a first control system, a fast steering mirror with a second control system, a diaphragm array, a microlens array, an illumination lens group, and a reflection mirror, all arranged sequentially along the propagation direction of the laser beam. The first control system utilizes a computer to control each micromirror on the micromirror array, allowing for the formation of desired intensity patterns on the diaphragm array. The second control system enables the fast steering mirror to adjust the created intensity pattern relative to the diaphragm array.
Career Highlights
Mingxing Chen is affiliated with the Chinese Academy of Sciences, where he has been instrumental in advancing research and development in optical technologies. His work has not only contributed to academic knowledge but has also had practical applications in various industries.
Collaborations
Mingxing Chen has collaborated with notable colleagues, including Aijun Zeng and Yunbo Zhang. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Mingxing Chen's contributions to the field of illumination devices exemplify the spirit of innovation and collaboration in scientific research. His patented technology has the potential to significantly impact the efficiency of projection lithography machines, showcasing the importance of inventors in advancing technology.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile