The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 31, 2017

Filed:

Dec. 30, 2015
Applicant:

Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai, CN;

Inventors:

Aijun Zeng, Shanghai, CN;

Yunbo Zhang, Shanghai, CN;

Mingxing Chen, Shanghai, CN;

Ying Wang, Shanghai, CN;

Huijie Huang, Shanghai, CN;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/54 (2006.01); G03F 7/20 (2006.01); G02B 5/00 (2006.01); G02B 3/00 (2006.01); G02B 26/08 (2006.01); G02B 26/10 (2006.01);
U.S. Cl.
CPC ...
G03F 7/702 (2013.01); G02B 3/0006 (2013.01); G02B 5/005 (2013.01); G02B 26/0833 (2013.01); G02B 26/105 (2013.01); G03F 7/7025 (2013.01); G03F 7/70075 (2013.01); G03F 7/70116 (2013.01);
Abstract

An illumination device comprises a laser source, a beam expander, a micromirror array having a first control system, a fast steering mirror having a second control system, a diaphragm array, a microlens array, an illumination lens group, and a reflection mirror sequentially along the propagation direction of the laser beam. The first control system comprises a first computer controlling each micromirror on the micro-mirror array through the micromirror array controller to rotate in two-dimensional directions so expanded beam forms desired intensity patterns on the diaphragm array after reflected by the micromirror array and fast reflection mirror and a micromirror array controller; the second control system comprises a second computer controlling the reflection mirror of the fast steering mirror to rotate through fast steering mirror controller so created intensity pattern moves relative to the diaphragm array and a fast steering mirror controller. Method for using the illumination device is provided.


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