This inventor holds 1 USPTO granted patent and 3 published patent applications. Top assignee: Samsung Electronics Ltd.. Active years: 2026.
Company Filing History:
Years Active: 2026
Title: Mingil Kim - Innovator in Substrate Processing Technology
Introduction
Mingil Kim is an inventor based in Suwon-si, South Korea. He is known for his contributions to the field of substrate processing technology. Although he currently holds no granted patents, his innovative ideas are reflected in his latest patent applications.
Latest Patent Applications
Mingil Kim has filed several notable patent applications, including:
1. **SUBSTRATE PROCESSING APPARATUS** - This application describes a support assembly used in a substrate processing apparatus that processes a substrate using plasma. It includes a base member, a support plate on the base member, an insulation member on the outer circumference of the base member, and a discharge passage connected to the insulation member's outer surface.
2. **SUBSTRATE PROCESSING APPARATUS FOR ETCHING A SUBSTRATE BY USING PLASMA** - This application outlines a substrate processing apparatus featuring a ceramic puck that supports a substrate. It also includes a pedestal beneath the ceramic puck, which receives a source radio frequency (RF) for plasma generation. A bias electrode, connected to a non-sinusoidal generator voltage, is arranged inside the ceramic puck.
Conclusion
Mingil Kim is an emerging inventor in the substrate processing field, with innovative applications that showcase his expertise and potential for future contributions. His work in developing advanced substrate processing apparatuses highlights the importance of innovation in technology.