This inventor holds 1 USPTO granted patent. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2005.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2005
Title: Innovations by Minghsng Tsai in Semiconductor Cleaning Technology
Introduction
Minghsng Tsai is a notable inventor based in Taipei, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly in the area of cleaning apparatuses for ECMD (Electrochemical Mechanical Deposition) processes. His innovative approach addresses critical challenges in maintaining the integrity of anode pads during semiconductor fabrication.
Latest Patents
Minghsng Tsai holds a patent for a "Cleaning apparatus for ECMD anode pad." This invention features a vacuum head that applies vacuum pressure to the surface of the anode pad between ECMD operations. The primary function of this apparatus is to remove particles that accumulate on the surface of the anode pad, thereby preventing inadvertent scratching or peeling of the wafer supported by the pad during the process. The design ensures that dislodged particles are effectively removed from the ECMD system through the flow of electrolyte solution into the vacuum head. The electrolyte solution is typically filtered before being returned to the electrolyte tank for redistribution to the ECMD system.
Career Highlights
Minghsng Tsai is associated with Taiwan Semiconductor Manufacturing Company Limited, a leading player in the semiconductor industry. His work focuses on enhancing the efficiency and reliability of semiconductor manufacturing processes through innovative cleaning solutions.
Collaborations
Minghsng Tsai collaborates with Shih-Wei Chou, a fellow professional in the semiconductor field. Their combined expertise contributes to advancements in semiconductor technology and manufacturing processes.
Conclusion
Minghsng Tsai's contributions to the semiconductor industry, particularly through his patented cleaning apparatus, highlight the importance of innovation in maintaining the quality of semiconductor manufacturing. His work continues to influence the efficiency of ECMD processes, ensuring better outcomes in semiconductor production.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile